Experimental and theoretical verification of channel conductivity degradation due to grain boundaries and defects in 3D NAND

Subirats, AlexandreAlexandreSubiratsArreghini, AntonioAntonioArreghiniCapogreco, ElenaElenaCapogrecoDelhougne, RomainRomainDelhougneTan, Chi LimChi LimTanHikavyy, AndriyAndriyHikavyyBreuil, LaurentLaurentBreuilDegraeve, RobinRobinDegraevePutcha, VamsiVamsiPutchaVan den Bosch, GeertGeertVan den BoschLinten, DimitriDimitriLintenFurnemont, ArnaudArnaudFurnemont2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29521Experimental and theoretical verification of channel conductivity degradation due to grain boundaries and defects in 3D NANDProceedings paperhttp://ieeexplore.ieee.org/document/8268433/