Patterning of graphene on silicon-on-insulator waveguides through laser ablation and plasma etching

Van Erps, JurgenJurgenVan ErpsCiuk, TymoteuszTymoteuszCiukPasternak, IwonaIwonaPasternakKrajewska, AleksandraAleksandraKrajewskaStrupinski, WlodekWlodekStrupinskiVan Put, StevenStevenVan PutVan Steenberge, GeertGeertVan SteenbergeBaert, KittyKittyBaertTerryn, HermanHermanTerrynThienpont, HugoHugoThienpontVermeulen, NathalieNathalieVermeulen2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27458Patterning of graphene on silicon-on-insulator waveguides through laser ablation and plasma etchingProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2523711&resultClick=1