La Manna, AntonioAntonioLa MannaDaily, RobertRobertDailyCapuz, GiovanniGiovanniCapuzRebibis, Kenneth JuneKenneth JuneRebibisBogaerts, LieveLieveBogaertsMiller, AndyAndyMillerBeyne, EricEricBeyne2021-10-202021-10-202012-12https://imec-publications.be/handle/20.500.12860/20973Process development to enable die sorting and 3D IC stackingProceedings paper