Application of group IV epitaxy for production of gate all around transistors

Hikavyy, AndriyAndriyHikavyyMertens, HansHansMertensWitters, LiesbethLiesbethWittersLoo, RogerRogerLooHoriguchi, NaotoNaotoHoriguchi2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28514Application of group IV epitaxy for production of gate all around transistorsProceedings paper