Surface contamination and electrical damage by focused ion beam: conditions applicable to the extraction of TEM lamellae from nano-electronic devices

Bender, HugoHugoBenderFranquet, AlexisAlexisFranquetDrijbooms, ChrisChrisDrijboomsParmentier, BrigitteBrigitteParmentierClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstKwakman, LaurensLaurensKwakman2021-10-222021-10-2220150268-1242https://imec-publications.be/handle/20.500.12860/24983Surface contamination and electrical damage by focused ion beam: conditions applicable to the extraction of TEM lamellae from nano-electronic devicesJournal articlehttp://iopscience.iop.org/article/10.1088/0268-1242/30/11/114015