On the breakdown statistics and mechanisms in ultra-thin oxides and nitrided oxides

Groeseneken, GuidoGuidoGroesenekenDegraeve, RobinRobinDegraeveDe Blauwe, JanJanDe BlauweRoussel, PhilippePhilippeRousselDepas, MichelMichelDepasMaes, HermanHermanMaes2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1903On the breakdown statistics and mechanisms in ultra-thin oxides and nitrided oxidesProceedings paper