Impact of the metal gate on the oxide stack quality assessed by low-frequency noise

Simoen, EddyEddySimoenHe, LiangLiangHeO'Sullivan, BarryBarryO'SullivanVeloso, AnabelaAnabelaVelosoHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertClaeys, CorCorClaeys2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29439Impact of the metal gate on the oxide stack quality assessed by low-frequency noiseProceedings paperhttp://ecst.ecsdl.org/content/80/4/69.abstract