P-N junction diagnostics of the electrical epi-layer quality: a feasibility study

Simoen, EddyEddySimoenPoyai, AmpornAmpornPoyaiClaeys, CorCorClaeysCzerwinski, A.A.Czerwinski2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2952P-N junction diagnostics of the electrical epi-layer quality: a feasibility studyProceedings paper