New insights into metal drift induced failure in MOL and BEOL

Wu, ChenChenWuVarela Pedreira, OlallaOlallaVarela PedreiraLesniewska, AlicjaAlicjaLesniewskaLi, YunlongYunlongLiCiofi, IvanIvanCiofiTokei, ZsoltZsoltTokeiCroes, KristofKristofCroes2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32282New insights into metal drift induced failure in MOL and BEOLProceedings paperhttps://ieeexplore.ieee.org/document/8353551/