The influence of capping layer type on cobalt salicide formation in films and narrow lines

Besser, PaulPaulBesserLauwers, AnneAnneLauwersRoelandts, NicoNicoRoelandtsMaex, KarenKarenMaexBlum, W.W.BlumAlvis, R.R.AlvisStucchi, MicheleMicheleStucchide Potter de ten Broeck, MurielMurielde Potter de ten Broeck2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2394The influence of capping layer type on cobalt salicide formation in films and narrow linesProceedings paper