Lorusso, GianGianLorussoSutani, TakeyoshiTakeyoshiSutaniRutigliani, VitoVitoRutiglianiVan Roey, FriedaFriedaVan RoeyMoussa, AlainAlainMoussaCharley, Anne-LaureAnne-LaureCharleyMack, ChrisChrisMackNaulleau, PatrickPatrickNaulleauConstantoudis, VassiliosVassiliosConstantoudisIkota, MasamiMasamiIkotaIshimoto, ToruToruIshimotoKoshihara, SSKoshihara2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31241The need for LWR metrology standardization: the imec roughness protocolProceedings paperhttps://doi.org/10.1117/12.2294617