Study of cobalt wet recess for fully self aligned vias in advanced interconnects

Akanishi, YuyaYuyaAkanishiPacco, AntoineAntoinePaccoHolsteyns, FrankFrankHolsteyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32416Study of cobalt wet recess for fully self aligned vias in advanced interconnectsMeeting abstract