Hermeticity testing and failure analysis of MEMS packages

De Wolf, IngridIngridDe WolfJourdain, AnneAnneJourdainDe Moor, PietPietDe MoorTilmans, HarrieHarrieTilmansMarchand, LaurentLaurentMarchand2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12006Hermeticity testing and failure analysis of MEMS packagesProceedings paper