Romo Negreira, AinhoaAinhoaRomo NegreiraCott, DaireDaireCottVerhulst, AnneAnneVerhulstCruz Esconjaurequi, SantiagoSantiagoCruz EsconjaurequiChiodarelli, NicoloNicoloChiodarelliEk Weis, JohanJohanEk WeisWhelan, CarolineCarolineWhelanGroeseneken, GuidoGuidoGroesenekenHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe GendtVereecken, PhilippePhilippeVereecken2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14389Growth and integration of high-density CNT for BEOL interconnectsProceedings paper