Proof-of-concept structure for investigation of successive soft gate oxide breakdowns in two dimensions

Kaczer, BenBenKaczerFernandez, RaulRaulFernandezNackaerts, AxelAxelNackaertsChiarella, ThomasThomasChiarellaGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162007-07https://imec-publications.be/handle/20.500.12860/12376Proof-of-concept structure for investigation of successive soft gate oxide breakdowns in two dimensionsProceedings paper