Lansbergen, G.P.G.P.LansbergenRahman, R.R.RahmanWellard, C.J.C.J.WellardCaro, J.J.CaroCollaert, NadineNadineCollaertBiesemans, SergeSergeBiesemansKlimeck, G.G.KlimeckHollenberg, L.C.L.L.C.L.HollenbergRogge, S.S.Rogge2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13986Transport-based dopant metrology in advanced FinFETsProceedings paper