Hoffmann, MichaelMichaelHoffmannSchenk, TonyTonySchenkKulemanov, IgorIgorKulemanovAdelmann, ChristophChristophAdelmannPopovici, Mihaela IoanaMihaela IoanaPopoviciSchroeder, UweUweSchroederMikolajick, ThomasThomasMikolajick2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23949Low temperature compatible hafnium oxide based ferroelectricsJournal articlehttp://www.tandfonline.com/doi/full/10.1080/00150193.2015.1012401#.VdspfU0w-70