Nguyen, B. H.B. H.NguyenWu, C.C.WuCzarnecki, P.P.CzarneckiRochus, V.V.Rochus2025-01-142025-01-142025-JAN 60003-6951WOS:001390823400022https://imec-publications.be/handle/20.500.12860/45080Observation of flexoelectric effect in PECVD silicon nitrideJournal article10.1063/5.0244972WOS:001390823400022PIEZOELECTRICITY