Zhu, YunpengYunpengZhuWang, JieJieWangXie, WeiqiangWeiqiangXieTian, BinBinTianLi, YanLuYanLuLiBrainis, EdouardEdouardBrainisJiao, YuqingYuqingJiaoVan Thourhout, DriesDriesVan Thourhout2021-10-242021-10-242017-121094-4087https://imec-publications.be/handle/20.500.12860/30029Ultra-compact silicon nitride grating coupler for microscopy systemJournal articlehttps://www.osapublishing.org/oe/abstract.cfm?uri=oe-25-26-33297