Moussa, AlainAlainMoussaCharley, Anne-LaureAnne-LaureCharleyLeray, PhilippePhilippeLeray2025-07-282025-07-282025-02-24978-1-5106-8638-00277-786XWOS:001514426300028https://imec-publications.be/handle/20.500.12860/45951Atomic Force Microscopy: From research lab to High-Volume ManufacturingProceedings paper10.1117/12.3051414978-1-5106-8639-7WOS:001514426300028