De Smedt, FrankFrankDe SmedtVinckier, ChrisChrisVinckierCornelissen, IngridIngridCornelissenDe Gendt, StefanStefanDe GendtMeuris, MarcMarcMeurisGilis, G.G.GilisHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2504Ultra-thin oxide growth on silicon using ozonated solutionsOral presentation