Wiaux, VincentVincentWiauxMontgomery, PatrickPatrickMontgomeryVandenberghe, GeertGeertVandenbergheMonnoyer, PhilippePhilippeMonnoyerRonse, KurtKurtRonseConley,ConleyLitt,LittLucas,LucasFinders, JoJoFindersSocha,SochaVan Den Broeke,Van Den Broeke2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8400Arf solutions for low-k1 back-end imagingProceedings paper