Impact of Ge-oxide-scavenging on low-T steam oxidation and passivation of bi-axially strained Si0.75Ge0.25

Wostyn, KurtKurtWostynRagnarsson, Lars-AkeLars-AkeRagnarssonArimura, HiroakiHiroakiArimuraVaisman Chasin, AdrianAdrianVaisman ChasinConard, ThierryThierryConardRondas, DirkDirkRondasLoo, RogerRogerLooHolsteyns, FrankFrankHolsteynsHoriguchi, NaotoNaotoHoriguchi2021-10-272021-10-272019-10https://imec-publications.be/handle/20.500.12860/34451Impact of Ge-oxide-scavenging on low-T steam oxidation and passivation of bi-axially strained Si0.75Ge0.25Proceedings paperhttp://ecst.ecsdl.org/content/93/1/71.abstract