Spieth, SwenSwenSpiethBrett, O.O.BrettSeidl, K.K.SeidlAarts, ArnoArnoAartsErismis, Mehmet AkifMehmet AkifErismisHerwik, S.S.HerwikTrenkle, F.F.TrenkleTatzner, S.S.TatznerAuber, J.J.AuberDaub, M.M.DaubPereira Neves, HerculesHerculesPereira NevesPuers, BobBobPuersPaul, O.O.PaulRuther, P.P.RutherZengerle, RRZengerle2021-10-192021-10-1920110960-1317https://imec-publications.be/handle/20.500.12860/19819A floating 3D silicon microprobe array for neural drug delivery compatible with electrical recordingJournal article