Vanstreels, KrisKrisVanstreelsWu, ChenChenWuGonzalez, MarioMarioGonzalezVerdonck, PatrickPatrickVerdonckMartini, RobertoRobertoMartiniSchneider, DieterDieterSchneiderBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21752Effect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH filmsMeeting abstract