Optical beam-based defect localization methodologies for open and short failures in micrometer-scale 3-D TSV interconnects

Jacobs, Kristof J.P.Kristof J.P.JacobsLi, YunlongYunlongLiStucchi, MicheleMicheleStucchiDe Wolf, IngridIngridDe WolfVan Huylenbroeck, StefaanStefaanVan HuylenbroeckDe Vos, JoeriJoeriDe VosBeyne, EricEricBeyne2021-10-282021-10-2820202156-3950https://imec-publications.be/handle/20.500.12860/35317Optical beam-based defect localization methodologies for open and short failures in micrometer-scale 3-D TSV interconnectsJournal articlehttps://ieeexplore.ieee.org/document/9157942