Ruzzarin, MariaMariaRuzzarinGeens, KarenKarenGeensBorga, MatteoMatteoBorgaLiang, HuHuLiangYou, ShuzhenShuzhenYouBakeroot, BenoitBenoitBakerootDecoutere, StefaanStefaanDecoutereDe Santi, CarloCarloDe SantiNeviani, AndreaAndreaNevianiMeneghini, MatteoMatteoMeneghiniMeneghesso, GaudenzioGaudenzioMeneghessoZanoni, EnricoEnricoZanoni2021-10-292021-10-2920200026-2714https://imec-publications.be/handle/20.500.12860/35862Exploration of gate trench module for vertical GaN devicesJournal articlehttps://doi.org/10.1016/j.microrel.2020.113828