Fabrication of ultra-compact photonic structures in Silicon-on-Insulator (SOI) using 248nm deep lithography

Bogaerts, WimWimBogaertsWiaux, VincentVincentWiauxTaillaert, DirkDirkTaillaertBeckx, StephanStephanBeckxBaets, RoelRoelBaets2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6043Fabrication of ultra-compact photonic structures in Silicon-on-Insulator (SOI) using 248nm deep lithographyProceedings paper