Dézsi, I.I.DézsiFetzer, C.C.FetzerBill, E.E.BillCaymax, MattyMattyCaymaxPattyn, HugoHugoPattynDegroote, SvenSvenDegrooteLangouche, G.G.LangoucheVantomme, AndreAndreVantomme2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3419Metastable and stable transistion-metal silicide layer formation in Si and SiGeOral presentation