Iacopi, FrancescaFrancescaIacopiBeyer, GeraldGeraldBeyerTravaly, YoussefYoussefTravalyWaldfried, CarloCarloWaldfriedGage, David M.David M.GageDauskardt, ReinholdReinholdDauskardtHouthoofd, KristofKristofHouthoofdJacobs, PierrePierreJacobsAdriaensens, PeterPeterAdriaensensSchulze, KnutKnutSchulzeSchulz, StefanStefanSchulzList, ScottScottListCarlotti, GiovanniGiovanniCarlotti2021-10-162021-10-162007-02https://imec-publications.be/handle/20.500.12860/12326Thermo-mechanical properties of thin organosilicate glass films treated by ultra-violet-assisted cureJournal article