Unraveling the EUV photoresist reactions : which, how much, and how do they relate to printing performance

Pollentier, IvanIvanPollentierPetersen, JohnJohnPetersenDe Bisschop, PeterPeterDe BisschopDe Simone, DaniloDaniloDe SimoneVandenberghe, GeertGeertVandenberghe2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33815Unraveling the EUV photoresist reactions : which, how much, and how do they relate to printing performanceProceedings paperhttps://doi.org/10.1117/12.2515456