Li, ZilanZilanLiSchram, TomTomSchramWitters, ThomasThomasWittersCho, Hag-JuHag-JuChoO'Sullivan, BarryBarryO'SullivanHooker, JacobJacobHookerDe Gendt, StefanStefanDe GendtDe Meyer, KristinKristinDe Meyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12486Investigation on molybdenum and its conductive oxides as p-type metal gate candidatesProceedings paper