Singanamalla, RaghunathRaghunathSinganamallaVan Dal, MarkMarkVan DalDemand, MarcMarcDemandShamiryan, DenisDenisShamiryanBeckx, StephanStephanBeckxJaenen, PatrickPatrickJaenenLocorotondo, SabrinaSabrinaLocorotondoYu, HongYuHongYuYuHooker, JacobJacobHookerKubicek, StefanStefanKubicekDe Meyer, KristinKristinDe MeyerBiesemans, SergeSergeBiesemansJuffermans, CasperCasperJuffermansLander, RobRobLander2021-10-162021-10-162007-04https://imec-publications.be/handle/20.500.12860/12914Metal inserted poly-Si (MIPS) and FUSI dual metal (TaN and NiSi) CMOS integrationProceedings paper