Depas, MichelMichelDepasVermeire, BertBertVermeireMertens, PaulPaulMertensMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/131Ultra-thin gate oxide yield and reliabilityProceedings paper