Insights into the C distribution in Si:C/Si:C:P and the annealing behavior of Si:C layers

Dhayalan, Sathish KumarSathish KumarDhayalanNuytten, ThomasThomasNuyttenPourtois, GeoffreyGeoffreyPourtoisSimoen, EddyEddySimoenPezzoli, FabioFabioPezzoliBonera, EmilianoEmilianoBoneraLoo, RogerRogerLooRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyShimura, YosukeYosukeShimuraVandervorst, WilfriedWilfriedVandervorst2021-10-272021-10-2720192162-8769https://imec-publications.be/handle/20.500.12860/32890Insights into the C distribution in Si:C/Si:C:P and the annealing behavior of Si:C layersJournal article10.1149/2.0181903jss