Fallica, RobertoRobertoFallicaNannarone, StefanoStefanoNannaroneMahne, NicolaNicolaMahneMalvezzi, Andrea MarcoAndrea MarcoMalvezziBerti, AndreaAndreaBertiDe Simone, DaniloDaniloDe Simone2023-08-042023-06-202023-06-222023-08-0420210914-9244WOS:000755962200016https://imec-publications.be/handle/20.500.12860/41901Evolution of Secondary Electrons Emission During EUV Exposure in PhotoresistsJournal articlehttps://doi.org/10.2494/photopolymer.34.99WOS:000755962200016