Chamirian, OxanaOxanaChamirianKittl, JorgeJorgeKittlLauwers, AnneAnneLauwersRichard, OlivierOlivierRichardVan Dal, MarkMarkVan DalMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7301Thickness scaling issues of Ni-silicideJournal article