Experimental and theoretical study of RF capacitevely-coupled plasma in the Ar/CF4/CF3I mixtures

Proshina, O.O.ProshinaRakhimova, T.T.RakhimovaLopaev, D.D.LopaevSamara, V.V.SamaraBaklanov, MikhaïlMikhaïlBaklanovde Marneffe, Jean-FrancoisJean-Francoisde Marneffe2021-10-222021-10-2220150963-0252https://imec-publications.be/handle/20.500.12860/25777Experimental and theoretical study of RF capacitevely-coupled plasma in the Ar/CF4/CF3I mixturesJournal articlehttp://iopscience.iop.org/article/10.1088/0963-0252/24/5/055006/meta