Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic appliation

Nguyen, DuyDuyNguyenWang, GangGangWangBrammertz, GuyGuyBrammertzLeys, MaartenMaartenLeysWaldron, NiamhNiamhWaldronWinderickx, GillisGillisWinderickxLismont, KevinKevinLismontDekoster, JohanJohanDekosterLoo, RogerRogerLooMeuris, MarcMarcMeurisDegroote, StefanStefanDegrooteButtita, FFButtitaO'Neil, B.B.O'NeilFéron, O.O.FéronLindner, J.J.LindnerSchulte, F.F.SchulteSchineller, B.B.SchinellerHeuken, M.M.HeukenCaymax, MattyMattyCaymax2021-10-182021-10-182010-10https://imec-publications.be/handle/20.500.12860/17690Selective epitaxial growth of III-V semiconductor heterostructures on Si substrates for logic appliationProceedings paper