Bender, HugoHugoBenderRichard, OlivierOlivierRichardNistor, L.L.NistorGutakovskii, A.A.GutakovskiiStuer, C.C.StuerDetavernier, C.C.Detavernier2021-10-152021-10-152003-04https://imec-publications.be/handle/20.500.12860/7196Structural characterisation of advanced silicidesProceedings paper