Goux, LudovicLudovicGouxMenou, N.N.MenouLisoni, JuditJuditLisoniSchwitters, M.M.SchwittersParaschiv, VasileVasileParaschivMaes, DavidDavidMaesZhen, X.X.ZhenKaczer, BenBenKaczerHaspeslagh, LucLucHaspeslaghWouters, DirkDirkWoutersMuller, C.C.MullerCaputa, C.C.CaputaZambrano, R.R.Zambrano2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8974Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPsOral presentation