Yu, HaoHaoYuSchaekers, MarcMarcSchaekersBarla, KathyKathyBarlaHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertThean, AaronAaronTheanDe Meyer, KristinKristinDe Meyer2021-10-232021-10-2320160003-6951https://imec-publications.be/handle/20.500.12860/27637Contact resistivities of metal-insulator-semiconductor contacts and metal-semiconductor contactsJournal articlehttp://scitation.aip.org/content/aip/journal/apl/108/17/10.1063/1.4947580