The dependence of stress induced voiding on line width studied by conventional and high resolution resistance measurements

Witvrouw, AnnAnnWitvrouwMaex, KarenKarenMaexDe Ceuninck, WardWardDe CeuninckLekens, GeertGeertLekensD'Haen, JanJanD'HaenDe Schepper, LucLucDe Schepper2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3158The dependence of stress induced voiding on line width studied by conventional and high resolution resistance measurementsProceedings paper