A CMOS-compatible 20MHz poly-SiGe MEMS oscillator with low-power heating for frequency stabilization over temperature

Jansen, RoelofRoelofJansenLibois, MichaelMichaelLiboisRottenberg, XavierXavierRottenbergLofrano, MelinaMelinaLofranoDe Coster, JeroenJeroenDe CosterVan Hoof, RitaRitaVan HoofSeveri, SimoneSimoneSeveriVan der Plas, GeertGeertVan der PlasDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmansDonnay, StephaneStephaneDonnayBorremans, JonathanJonathanBorremans2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19121A CMOS-compatible 20MHz poly-SiGe MEMS oscillator with low-power heating for frequency stabilization over temperatureProceedings paper