Buiu, O.O.BuiuOsiceanu, PetrePetreOsiceanuVandervorst, WilfriedWilfriedVandervorstCozar, O.O.Cozar2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1107Oxygen ion beam oxidation of silicon: an ESCA studyProceedings paper