Rampelberg, GeertGeertRampelbergSchaekers, MarcMarcSchaekersMartens, KoenKoenMartensXie, QiQiXieDeduytsche, DavyDavyDeduytscheDe Schutter, BobBobDe SchutterBlasco, NicolasNicolasBlascoKittl, JorgeJorgeKittlDetavernier, ChristopheChristopheDetavernier2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21378Semiconductor-metal transition in thin VO2 films deposited by ozone based atomic layer depositionMeeting abstract