Anomalous positive-bias temperature instability of high-k/metal gate devices with Dy2O3 capping

O'Connor, RobertRobertO'ConnorChang, VincentVincentChangPantisano, LuigiLuigiPantisanoRagnarsson, Lars-AkeLars-AkeRagnarssonAoulaiche, MarcMarcAoulaicheO'Sullivan, BarryBarryO'SullivanGroeseneken, GuidoGuidoGroeseneken2021-10-172021-10-1720080003-6951https://imec-publications.be/handle/20.500.12860/14235Anomalous positive-bias temperature instability of high-k/metal gate devices with Dy2O3 cappingJournal articlehttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=APPLAB000093000005053506000001&idtype=cvips&prog=search