Claes, MartineMartineClaesParaschiv, VasileVasileParaschivBoutkabout, HakimHakimBoutkaboutWitters, ThomasThomasWittersDe Gendt, StefanStefanDe GendtRohr, ErikaErikaRohrCoenegrachts, BartBartCoenegrachtsVertommen, JohanJohanVertommenRichard, OlivierOlivierRichardLindsay, RichardRichardLindsayBoullart, WernerWernerBoullartHeyns, MarcMarcHeyns2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8689Selective wet etching of HF-based layersProceedings paper