Claeys, CorCorClaeysSimoen, EddyEddySimoenSatta, AlessandraAlessandraSattaOpsomer, KarlKarlOpsomerMeuris, MarcMarcMeuris2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11882Processing and defect control in advanced Ge technologiesProceedings paper