Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process

Sattari, HamedHamedSattariTakabayashi, Alain YujiAlain YujiTakabayashiEdinger, PierrePierreEdingerVerheyen, PeterPeterVerheyenGylfason, Kristinn B.Kristinn B.GylfasonBogaerts, WimWimBogaertsQuack, NielsNielsQuack2023-04-122023-02-102023-04-1220222708-5260WOS:000908435100003https://imec-publications.be/handle/20.500.12860/41079Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry processJournal article10.1117/1.JOM.2.4.044001WOS:000908435100003OPTICAL BISTABILITY